Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography

The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of −2.6dB at the wavelength of 1550nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.