Many analysis methods can be used to characterize surfaces and interfaces of thin layered materials. Glancing incidence x‐ray analysis (GIXA) has the potential of being one of the most powerful and versatile analysis methods that can be used because it combines x‐ray reflectivity (XRR) and x‐ray fluorescence (XRF). This technique enables the non‐destructive determination of layer thickness, interface roughness and elementary depth profile. Sophisticated laboratory instrumentation is described which enables materials to be characterized in detail using newly developed analysis algorithms.
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Hoogenhof et al. (1994) studied this question.
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