Gas Sensing Behavior of Mesoporous SiOC Glasses

In this study, for the first time, we report the gas sensing behavior of aerogel‐derived silicon oxycarbide (SiOC) glasses. The SiOC glass pyrolyzed at 1400°C has specific surface area of 150 m 2 /g with pore size in the 2–20 nm range. SiOC sensor shows good response to 5 ppm NO 2 at 300°C. NO 2 response completely disappears at 400°C, and from this temperature SiOC sensor starts respond to H 2 . The optimum sensitivity for H 2 is obtained at 500°C. SiOC sensor is very selective; it is not sensitive to other gases such as acetone vapor or CO , even at high concentrations.