Answers are grounded in this paper and cite their sources.
The reaction mechanism of the recently reported Me 3 AuPMe 3 –H 2 plasma gold ALD process was investigated using in situ characterization techniques in a pump-type ALD system.
No takes yet. Share an insight, caveat, or question.
Daele et al. (2020) studied this question.
Synapse has enriched 5 related papers. Consider them for comparative context: