The Proof of Minimal Heat Impact During Femtosecond Laser Machining of Small Scale Mechanical Test Samples - Example Gallium

Femtosecond laser machining has become a key tool to fabricate micromechanical test samples. However, the potential effect of a heat affected zone (HAZ) remains a concern. In this work, an approach of rapidly processing micromechanical test specimen using a joint fs-laser and focused ion beam approach is shown, drastically reducing time spent on sample preparation. This process is displayed on a heat sensitive material, gallium, to physically show the minimal HAZ and lack of heat accumulation effects in the process and establish a basis for further fs-laser usage in micromechanics.