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January 1, 2005Optics ExpressOpen Access

Mathematical model of spin-coated photoresist on a spherical substrate

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XFXiao-guo FengSLSun Lian-chun

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Feng et al. (2005) studied this question.

synapsesocial.com/papers/6aad17eeae3cd3e8f83dec37https://doi.org/10.1364/opex.13.007070
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