Innovation and Development of Micro- and Nano-machining Technology in Mechanical Manufacturing

Based on the application research of micro and nano machining technology in mechanical manufacturing, a micro and nano machining device was built for the contact mode of AFM, and its maximum machining range and maximum normal load were increased to 50mm and 100uN. At the same time, custom trajectory machining and variable force control machining subroutines were written, and vibration assisted machining modules were integrated to improve the machining capability of the whole machine. On this basis, the working performance test and machining experiment of the whole machine are carried out. Finally, the machining experiment was carried out using micro - and nano-mechanical machining device. The function test of the custom trajectory machining and the variable force control machining subroutine was carried out to verify the reliability of the machining subroutine, and the influence of different process parameters on the machining results was analyzed based on the nano-corrugated structure with the machining cycle controllable by the variable force control method. Based on the vibration-assisted machining module, the auxiliary machining technology was studied to explore the advantages of auxiliary machining compared with conventional machining: large-scale micro-nano structure machining experiments were conducted to verify the large-scale composite machining capability of the ma-chining device.