The numerical moire method with sensitivity as high as 0.03 nm has been presented. A quantitative displacement and strain analysis program has been proposed by using this method. It is applied to an edge dislocation and a stacking fault in aluminum. The measured strain of edge dislocation is compared with theoretical prediction given by Peierls-Nabarro dislocation model. The displacement of stacking fault is also obtained.
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Zhao et al. (2008) studied this question.