Radiation-induced damage and strain in AlAs were investigated by measurements of the lattice parameter using x-ray diffraction. Irradiations employed MeV C, Ar, and Au ion beams at 25 or 80 K. The out-of-plane lattice parameter increased with fluence at low doses, saturated, and then decreased to nearly its original value. The in-plane lattice parameter did not change, throughout. These results were independent of the irradiation particle when scaled by damage energy. Selected samples were examined by high-resolution and conventional transmission electron microscopy. Recovery of the lattice parameter during subsequent thermal annealing was also investigated.
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Partyka et al. (1994) studied this question.
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