Three-dimensional taper structures made from plasma-enhanced chemical vapor-deposited hydrogenated amorphous silicon were evaluated by calculating the deposition profiles with a line-of-sight model and the corresponding mode profiles with a full-vectorial mode solver. The tapers were fabricated with shadow-masks made from KOH-etched Si wafers, and with the tapers light was coupled into 500-nm-wide photonic wires from lensed fibers.
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Harke et al. (2008) studied this question.
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