A detailed theory of relative sputtering rates for glow discharge optical emission spectroscopy (GDOES) is presented for the first time. The theory suggests that such sputtering rates should be nearly independent of plasma conditions. This is supported by experimental results for r.f. GDOES under varying applied power or varying pressure. Relative sputtering rates are calculated for a range of cast irons, high‐alloy steels and zinc–aluminium alloys. Within measurement uncertainties, the calculated rates agree with measured relative sputtering rates.
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Payling et al. (2003) studied this question.
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