A platform for monolithic CMOS-MEMS integration on SOI wafers, Villarroya, María, Figueras, Eduard, Montserrat, Josep, Verd, Jaume, Teva, Jordi, Abadal, Gabriel, Murano, Francesc Pérez, Esteve, Jaume, Barniol, Núria
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Villarroya et al. (2006) studied this question.
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