Piezoreflectance study of an Fe-containing silicon carbon nitride crystalline film

A detailed piezoreflectance (PzR) study of an Fe-containing silicon carbon nitride crystalline film in the temperature range between 15 and 580 K was performed. From the line shape fit of the PzR spectra, the impurity to band and the direct band-to-band transition energies which are denoted as Ei and Egd, respectively, at various temperatures were accurately determined. The parameters that describe the temperature dependence of Ei and Egd are evaluated and discussed.