Combinatorial Pulsed Laser Deposition of Pentacene Films for Field Effect Devices

Summary:Combinatorial pulsed laser deposition (PLD) technique has been applied to the fabrication of pentacene thin films for field effect devices. The pentacene films were fabricated by PLD with the Nd:YAG laser wavelength, fluence and the substrate temperature as combinatorial parameters. From the IR and UV‐vis absorption spectra and electrical properties of the films, the laser wavelength and fluence have been elucidated to be factors dominating the properties of the film. Schematic diagram of a combinatorial pulsed laser deposition (PLD) system. magnified image Schematic diagram of a combinatorial pulsed laser deposition (PLD) system.