Coupling erbium dopants in yttrium orthosilicate to silicon photonic resonators and waveguides

A scalable platform for on-chip optical quantum networks will rely on standard top-down nanofabrication techniques and solid-state emitters with long coherence times. We present a new hybrid platform that integrates amorphous silicon photonic waveguides and microresonators fabricated on top of a yttrium orthosilicate substrate doped with erbium ions. The quality factor of one such resonator was measured to exceed 100,000 and the ensemble cooperativity was measured to be 0.54. The resonator-coupled ions exhibited spontaneous emission rate enhancement and increased coupling to the input field, as required for further development of on-chip quantum light-matter interfaces.