A system has been designed to generate monodisperse, single crystal silicon nanoparticles. The particles are generated using a SiH4/H2 mixture in a high density plasma. An aerodynamic lens assembly focuses and size selects the particles. A high voltage plate is used to accelerate the charged particles such that they can be injected into a high temperature annealing tube to be heated. The shape and structure of the particles are changed in the annealing tube. Single crystals are obtained.
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Dong et al. (2004) studied this question.
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