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June 15, 2007Journal of Applied PhysicsOpen Access

Real time spectroscopic ellipsometry on ultrathin (<50Å) hydrogenated amorphous silicon films on Si(100) and GaAs(100)

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POP.J. van den OeverMSM. C. M. van de SandenWKW. M. M. Kessels

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Oever et al. (2007) studied this question.

synapsesocial.com/papers/6aaf348fdebf0b2b005d20c3https://doi.org/10.1063/1.2749466
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