We have developed a micromachined Hall sensor for scanning the entire magnetic field vector whose active dimensions are an order of magnitude smaller (∼5 μm) than the smallest existing vector field sensor. It is realized by patterning three Hall probes on the tilted faces of epitaxy-overgrown GaAs-based pyramidal-shaped mesa structures. Data from these “tilted” Hall probes are used to reconstruct the full magnetic field vector.
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Gregušová et al. (2003) studied this question.
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