The incomplete pyrolysis of PH 3 is shown to have a significant effect on the growth rate and morphology of InP grown by hydride vapor phase epitaxy. Using ultraviolet absorption spectroscopy to determine the extent of PH 3 pyrolysis, the growth rate of InP is shown to increase with decreasing PH 3 pyrolysis. Incomplete PH 3 pyrolysis is also shown to dramatically increase the formation of growth hillocks on <100> InP epitaxial layers. The use of various metal catalysts to expedite PH 3 pyrolysis to eliminate hillock formation during InP growth is described, and a qualitative model of PH 3 induced hillock growth is presented.
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Karlicek et al. (1987) studied this question.
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