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A submicron soft X-ray beam is generated by a highly coherent soft X-ray laser at 13.9 nm with a Fresnel phase zone plate. The focused X-ray beam profile is measured using a knife-edge scan method, and the spot diameter and peak intensity are 0.5 µm at full width at half maximum and 1 ×10 11 W/cm 2 , respectively.
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Nishikino et al. (2008) studied this question.
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