Superconducting Cavity Electromechanics on a Silicon-on-Insulator Platform

The coupling of electromagnetic fields to nanomechanical systems has ushered in the field of q00exu00exa00exn00ext00exu00exm $o{{0}{0ex}}p{{0}{0ex}}t{{0}{0ex}}o{{0}{0ex}}m{{0}{0ex}}e{{0}{0ex}}c{{0}{0ex}}h{{0}{0ex}}a{{0}{0ex}}n{{0}{0ex}}i{{0}{0ex}}c{{0}{0ex}}s$, in which vibrating objects can be studied and used at the level of their quantum zero-point motion. The authors fabricate a planar technology platform for integrating nanophotonic, nanomechanical, and superconducting microwave circuits. Joining these components could yield a quantum converter between the microwave and optical frequency domains, enabling long-range networks of superconducting qubits for quantum information processing.