Study on monitoring filter-type LAC devices with various flow rates during FOUP opened using particle image velocimetry

This is the authors' abstract. We don't add key points for this paper.

The Laminar Air Curtain (LAC) device generates a uniform, vertically downward airflow to isolate airborne particles that have the potential to penetrate a FOUP. It is used to effectively prevent moisture from the Equipment Front-End Module (EFEM) from entering the FOUP. Under current usage conditions of the LAC device, the humidity remains stable, and contaminants are effectively isolated when the FOUP door is opened. However, prolonged use of high airflow rates can cause particle generation and deformation of the permeable plate. This study conducts experiments on a previously developed high-flow filter-type air curtain device to address issues related to high flow rates (700 L/min) and deformation. The flow rates used will range from low flow (350 L/min) to high flow (700 L/min). Using a Fan Filter Unit (FFU) to simulate microenvironmental lateral and inclined air flow at different angles, we employ Particle Image Velocimetry (PIV) to capture and compare the isolation effects and performance of the air curtain device at different flow rates against inclined and lateral airflow. The best-case studies with the highest level of cleanliness were introduced to the semiconductor industry.