Electron scattering cross sections and negative ion states of silane and halide derivatives of silane

The interaction of low-energy electrons with silane and its halogenated derivatives is a fundamental step in many plasma chemical processes. The total scattering cross-section for electrons in the 0.2–12 eV range are observed to range up to 10−14 cm2. Scattering resonances are assigned to temporary negative ion states on the basis of correlations with analogous inner shell excitation resonances.