Thick Self-Ordered Nanoporous Ta[sub 2]O[sub 5] Films with Long-Range Lateral Order

In this work we report the anodic formation of highly ordered nanoporous layers that exhibit a self-ordered alignment of pores uniformly over the anodized surface. These layers are grown by anodization of tantalum in a nonaqueous electrolyte consisting of an optimized glycerol/ethylene glycol mixture with the addition of . To reach an optimized nanoporous structure, several factors [fluoride concentration and content of supporting electrolyte ] need to be controlled. Once optimized, the nanopore diameter can be adjusted using the applied voltage in the range of 7–18 nm, and layers with a thickness of more than can be grown. As a result, a pore aspect ratio of can be reached.