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An effective top cladding for silicon-on-insulator grating coupler is designed and the validity of the design is confirmed experimentally. The proposed double-layer silicon oxide/silicon nitride (SiO 2 /Si 3 N 4 ) cladding demonstrates antireflection properties and affects a coupling strength of the grating structure. A coupling efficiency of 65% is obtained after cladding layer deposition.
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Xiao et al. (2012) studied this question.
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