Polymeric amines generated by UV-induced electron transfer in polymeric quaternized tetraalkylammonium borate salts are found suitable for the thermal cross-linking of epoxides where nucleophilic attack on the epoxy ring is favorable. A cross-linked polymer network insoluble in organic solvent becomes the basis of a negative-tone photoimaging system. Sensitivity and resolution parameters have been evaluated by atomic force microscopy (AFM). Addition of reagents containing hydroxyl moieties to a film containing both the polymeric amine precursor and epoxide improves sensitivity more than 3-fold manifesting chemical amplification due to the catalytic nature of the cross-linking process.
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Mejiritski et al. (1997) studied this question.
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