The effect of stoichiometry on the coloration efficiency (η) and cycling life of MoO3 films has been investigated and underlying reasons discussed in the paper. Optical studies reveal that as-deposited and 150 °C annealed films are nonstoichiometric while films deposited by activated reactive evaporation are stoichiometric. Nonstoichiometry in unintercalated MoO3 is associated with lower valence states of Mo is responsible for absorption in the 400–1000-nm spectral region. It is found that this nonstoichiometry affects η and the cycling life of the films adversely.
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Sian et al. (2005) studied this question.
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