Semipolar GaN films on patterned r-plane sapphire obtained by wet chemical etching

It is shown that (112¯2)-oriented GaN films can be achieved from r-sapphire patterned by chemical etching. Growth first occurs selectively from the inclined c-facet of sapphire, leading finally to a fully coalesced layer with (112¯2) orientation. The structural and optical quality of these layers was assessed by x-ray diffraction, cathodoluminescence and photoluminescence measurements. The results clearly show that the quality of (112¯2) GaN on patterned r-sapphire is markedly improved in comparison with (112¯2) GaN on m-sapphire.