This paper describes the state of the art as well as demands and a concept for CAD tools supporting fast prototyping of microelectromechanical systems (MEMS). Based on commercial tools available in several engineering sciences, a more general simulator has to be developed. In future simulation tools, a general manager has to consider an interactive communication on different levels.
No takes yet. Share an insight, caveat, or question.
Sandmaier et al. (1993) studied this question.
Synapse has enriched 5 related papers. Consider them for comparative context: