Irradiation behavior of SrTiO3 at temperatures close to the critical temperature for amorphization

Damage accumulation on both the Sr and Ti sublattices in strontium titanate (SrTiO3) has been investigated under 1.0MeV Au+ irradiation at 360 and 400K, close to the critical temperature for amorphization (∼370K). Under irradiation at 360K, the relative disorder on both sublattices follows a nonlinear dependence on ion dose. Amorphization starts from the damage peak region (at a depth of 60nm) and grows toward the surface and into the bulk. At 400K, the evolution of point defects to extended defects occurs as ion fluence increases. The disorder initially peaks at a depth of 60nm, saturates at a disorder level of ∼0.75, and then decreases with further irradiation. At an ion fluence of 6.0×1015cm−2, an amorphous layer of ∼10nm thickness is formed at the sample surface. After annealing at 375K for 1h, the buried amorphous layer formed during irradiation at 360K is recrystallized with planar defects and dislocation loops. However, the surface amorphous layer formed at 400K irradiation remains amorphous, and fewer defects are observed in the irradiated region. Irradiation-enhanced recrystallization due to high flux electron energy deposition is observed.