We review our earlier work that explained how a series capacitance implements negative feedback and stabilizes electrostatically actuated MEMS devices against the well known pull-in instability. We demonstrate through analysis and computer simulation that stability can be achieved using a series MOS capacitor. We also show that using MOS capacitor feedback can reduce the supply voltage required to deflect the mechanical members and can introduce both an electrostatic deflection limit as well as hysteresis.
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Seeger et al. (1970) studied this question.