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The TMR (Tunneling Magneto-resistive) junctions of SiO2-sub./bottom-electrode/IrMn/CoFe/Al-oxide/NiFe/top-electrode were fabricated.We have succeeded to observe both high sensitivity and linearity in a low magnetic field for the optimized TMR junctions.The circuit of magnetic sensor using developed TMR junctions exhibited high output signal enough to resolve over 36 directions at terrestrial magnetism.The terrestrial sensor using TMR junctions is very small size and low energy consumption, so will be key "tools" for some solutions, for example, a navigation sensor with Global Positioning System(GPS) in cell phones.
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Kou et al. (2008) studied this question.
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