Models of radiofrequency coupling for negative ion sources

Radiofrequency heating for ICP (inductively coupled plasma) ion sources depends on the source operating pressure, the presence or absence of a Faraday shield, the driver coil geometry, the frequency used, and the magnetic field configuration: in negative ion source a magnetic filter seems necessary for H(-) survival. The result of single particle simulations showing the possibility of electron acceleration in the preglow regime and for reasonable driver chamber radius (15 cm) is reported, also as a function of the static external magnetic field. An effective plasma conductivity, depending not only from electron density, temperature, and rf field but also on static magnetic field is here presented and compared to previous models. Use of this conductivity and of multiphysics tools for a plasma transport and heating model is shown and discussed for a small source.