In situ monitoring of surface postprocessing in large-aperture fused silica optics with optical coherence tomography

Optical coherence tomography (OCT) is explored as a method to image laser-damage sites located on the surface of large aperture fused silica optics during postprocessing via CO2 laser ablation. The signal analysis for image acquisition was adapted to meet the sensitivity requirements for this application. A long-working-distance geometry was employed to allow imaging through the opposite surface of the 5 cm thick optic. The experimental results demonstrate the potential of OCT for remote monitoring of transparent material processing applications.