Fabrication of Miniature PO2 and pH Sensors Using Microelectronic Techniques

Miniature PO2 and pH sensors can be used in combination with enzymatic catalysts such as glucose oxidase and glucose dehydrogenase as the basis for the development of a small glucose sensor. The applications of microelectronic techniques such as photolithography techniques and thick- and thin-film metallization are novel approaches in fabricating highly uniform and reproducible sensors that are relatively simple to calibrate and operate.