Femtosecond laser is used to form three-dimensional (3D) microstructures embedded in FOTURAN, a photosensitive glass. The microstructures are realized using a three steps process including infrared femtosecond exposure, heating process and etching in an ultrasonic solution of hydrofluoric acid in water. The experiments were carried out using a specially designed ultrafast laser micromachining station, which included a femtosecond laser (170fs, 800nm, 1 mJ/pulse at repetition rate of 1kHz), a beam shaping apparatus and a 3D fully automated positioning system. The photosensitization mechanism involves the generation of a photoelectron due to the absorption of six photons, which then neutralizes the silver ions thus forming crystallized areas upon heat treatment. Efficiency of the fabrication process is discussed in terms of the various laser and etching fabrication parameters. An example of the fabrication of a 3D microfluidic system for biomedical applications is presented.
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A 2006 study studied this question.