The Microstructure and Capacitance Characterizations of Anodic Titanium Based Alloy Oxide Nanotube

This paper presents a simple anodization process to fabricate ordered nanotubes (NTs) of titanium and its alloys (Ti‐Mo and Ti‐Ta). TiO2, MoO3, and Ta2O5 are high dielectric constant materials for ultracapacitor application. The anodic titanium oxide contains a compact layer on the NT film and a barrier layer under the NT film. However, the microstructure of oxide films formed by anodic Ti‐Mo and Ti‐Ta alloys contains six layers, including a continuous compact layer, a continuous partial porous layer, a porous layer, a net layer, an ordering NT film, and an ordering compact barrier layer. There are extra layers, which are a partial porous layer and a porous layer, not presented on the TiO2 NT film. In this paper, we fabricated very high surface area ordered nanotubes from Ti and its alloys. Based on the differences of alloys elements and compositions, we investigated and calculated the specific capacitance of these alloys oxide nanotubes.