In this study, a radio-frequency plasma system was used to decompose a dichloromethane (CH2Cl2) containing gas. Analyses of the reactants and final products were conducted by using Fourier Transform Infrared Spectroscopy. Then, the effects of plasma operation-parameters, including the gas flow rate, the feeding CH2Cl2 concentration, the equivalence ratio ϕ ( = stoichiometric O2 needed/actual O2 used) and the input power wattage, for CH2Cl2 decomposition and for the fraction of total carbon input converted into CO2 and CO were investigated. Mole fraction profiles for each experimental condition were determined for the reactants (CH2Cl2 and O2) and for CO, CO2, H2O, HCl, CHCl3, CCl4, COCl2, C2HCl3 and C2Cl4. In addition, the possible reaction pathways were built up and discussed.
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Li et al. (1996) studied this question.