Fundamental Study of Cavitation Sensors Fabricated with Lead Zirconate Titanate Film Deposited by Hydrothermal Method: Analysis and Consideration of Output Signal from the Sensor

Small cavitation sensors were developed with hydrothermally synthesized lead zirconate titanate (PZT) on the outer surface of the Ti cylinder. Output signals from the fabricated cavitation sensor were analyzed in frequency domain with changing applied voltage to the Langevin transducer of the ultrasound exposure system. Frequency components from 1 to 5 MHz included in the output signal from the cavitation sensor were measured as the cavitation signal in order to distinguish the harmonic components from acoustic cavitation from those by nonlinear propagation in water. Broadband integrated voltage can be calculated by integrating harmonic components from 1 to 5 MHz included in the output signal from the cavitation sensor.