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August 17, 2015Applied Physics Letters

Yttrium scandate thin film as alternative high-permittivity dielectric for germanium gate stack formation

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Authors

CLCimang LuShenzhen Technology UniversityCLChoong Hyun LeeKookmin UniversityTNTomonori NishimuraThe University of Tokyo

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Lu et al. (2015) studied this question.

synapsesocial.com/papers/6ab399a062d4080ef829d518https://doi.org/10.1063/1.4928749
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