A comparison is presented of the cross‐sectional mechanical properties (i.e. hardness and Young's modulus) for electrodeposited microsystem components with conventional polycrystalline and nanocrystalline structures. It is shown that nanocrystalline electrodeposits exhibit considerabily improved cross‐sectional properties both in terms of uniformity (hardness and Young's modulus) and overall hardness level. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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Baghbanan et al. (2006) studied this question.
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