January 1, 2008Electrochemical and Solid-State Letters

Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application

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Abstract

Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application, Yim, Sung-Soo, Lee, Do-Joong, Kim, Ki-Su, Lee, Moon-Sang, Kim, Soo-Hyun, Kim, Ki-Bum

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Yim et al. (2008) studied this question.

synapsesocial.com/papers/6ab49e9a57e145167e4d3922 https://doi.org/10.1149/1.2952432

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Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application

Abstract

Discussion

Cite This Study

Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application

Abstract

Discussion

Cite This Study

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