Modelling of micropumps using unimorph piezoelectric actuator and ball valves

This paper presents a general approach to the problem of modelling membrane micropumps. The proposed approach is aimed at predicting the performance of a specific micropump versus the working frequency, according to its geometrical and mechanical characteristics. This can be very useful during the design process of microfluidic devices including several membrane micropumps connected in a complex layout. The developed model has been applied to the specific class of micropumps based on piezoelectric unimorph actuator and ball check valves. Model predictions agree with the experimental results obtained on prototypes made in the authors laboratory.