Physical and Electrochemical Characterization of Thin Films of Iron Phosphate and Nitrided Iron Phosphate for All-Solid-State Batteries

An attempt was made to fabricate all-solid-state lithium-ion rechargeable batteries with amorphous iron phosphate and iron phosphorous oxynitride thin-film electrodes, which have been successfully fabricated by radio-frequency sputtering at oxygen and nitrogen ambient, respectively. The all-solid-state thin-film battery of had a higher capacity of than by discharge/charge measurement. For novel thin-film electrode, the insertion of nitrogen into has been examined by X-ray photoelectron spectra and Raman spectroscopy. Our results demonstrated that and thin film electrodes with the features of amorphous structure, good-matched interface with electrolyte, and low-temperature preparation conditions may make them attractive as cathodes for the all-solid-state thin-film lithium-ion batteries.