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July 1, 2005Journal of Applied PhysicsOpen Access

Characterization of buried photonic crystal waveguides and microcavities fabricated by deep ultraviolet lithography

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IMIwan MärkiSaab (Switzerland)MSMartin SaltOerlikon (Switzerland)HHHans Peter HerzigÉcole Polytechnique Fédérale de Lausanne

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Märki et al. (2005) studied this question.

synapsesocial.com/papers/6ab5c63f11ffef926e20ae83https://doi.org/10.1063/1.1948507
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