Technique of sequential surface analysis with ISS and AES

The development of a new approach is briefly described, which enables Auger electron spectroscopy (AES) and ion scattering spectroscopy (ISS) to be performed sequentially with a commercial‐type Auger microprobe. These sequential AES and ISS measurements were applied to depth composition analysis of the altered layer formed in the surface of AlMg(60 at%) alloy under ion bombardment. A simple analysis has suggested that the ion bom‐bardment forms an altered layer in the surface, which consists of Mg‐rich composition at the top‐most atomic layer, followed by the depletion layers of Mg atoms extending over a few tens of atomic layers deep.