Depth profiling of surface coatings is the most significant field in analytical applications of glow discharge optical emission spectrometry. This paper suggests a method for evaluating the depth resolution of the profiles. For this purpose, the emission intensities that are differentiated as a function of sample depth can be used. The differentiated intensities follow a characteristic curve at the coating/substrate interface. The analyses of the differential curve provide useful knowledge about the depth resolution interface.
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Hamada et al. (1995) studied this question.
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