Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation D. M. Sanders, E. N. Farabaugh, W. S. Hurst, W. K. Haller; Summary Abstract: An advanced multi‐chamber system for preparation of amorphous thin films by coevaporation and their subsequent characterization by AES, ESCA, SIMS and ISS methods. J. Vac. Sci. Technol. 1 April 1981; 18 (3): 1308–1310. https://doi.org/10.1116/1.570923 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science and Technology Search Advanced Search |Citation Search
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Sanders et al. (1981) studied this question.