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Development of minimally invasive dry electrodes for recording biopotentials is presented. The detailed fabrication process is outlined. A dry electrode is formed by a number of microneedles. The lengths of the microneedles are about 150μm and the diameters are about 50μm. The tips of the microneedles are sharp enough to penetrate into the skin. The silver/silver chloride is grown on microneedle arrays and demonstrates good character. The electrocardiogram shows that the dry electrode is suitable for recording biopotentials.
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Wang et al. (2011) studied this question.
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