Surface recombination of oxygen atoms in O2 plasma at increased pressure: I. The recombination probability and phenomenological model of surface processes

This work deals with the study of oxygen atom loss on a quartz surface in a glow discharge plasma in pure O2 at increased pressures (5–50 Torr). O atom loss probabilities are obtained from the radial distributions of oxygen dissociation degree measured by the actinometry method. It is shown that the applicability of the actinometry method at high pressures requires the knowledge of the spatial distribution of a reduced electric field for the correct calculation of the electronic excitation rates of oxygen and actinometer atoms. The analysis of the obtained data within the framework of a simple phenomenological model of the surface processes revealed that O atom surface recombination with physisorbed oxygen atoms and molecules (producing O2 and O3, respectively) is the main loss channel for oxygen atoms in O2 plasmas at increased pressures. The oxygen atom loss probability can noticeably grow in comparison with the case of low pressure due to the essential increase in the surface occupation degree by physisorbed atoms and molecules.